Tsukuba Seiko Co., Ltd.(筑波精工株式会社)

Our Vision

Aiming to be a global top niche company
for electrostatic chucks

Internal R&D structure for rapidly responding
to customer needs

Maximum satisfaction for
all our stakeholders

Tsukuba Seiko electrostatic chuck HPTS makes
fundamental changes to manufacturing processes
Advanced technology for stable adhesion regardless
of the material

Electrostatic chuck experts out of the University of Tokyo

Our current president applied the results of his research during his time at the University of Tokyo Higuchi Lab to develop an electrostatic chuck business

Choosing fab-lite

Use a fab-lite strategy to reduce the capital investments needed for your manufacturing business

Internal R&D structure

Providing electrostatic chucks optimized for each customer based on our internationally patented basic technology.

See product information

Structure for collaborating with peripheral equipment manufacturers

Achieving stable supply by collaborating with peripheral equipment manufacturers making equipment such as automated machine for adsorption and release of Supporter.

Global activity base

Sales office located in Taiwan, a hub for manufacturing foundries. Also planning to establish a service office.

View Taiwan Office Details

Innovative cordless electrostatic chuck

Wafer Supporter that achieves suction even with the power off enables previously unattainable integration in manufacturing lines for thin semiconductors.

See our Supporter