The system can be made cordless by integrating an adsorption component, a power supply board, and a battery.
Work position can be fixed without the need for in-line operation or equipment modifications, or wiring processing for existing facilities.
| Application | For in-line equipment, stage jigs, use in vacuum equipment, fixed stages |
|---|---|
| Work | Glass, film, metal pieces, glass pieces etc. |
Handheld electrostatic chuck for wafers, glass substrates, metal foils, and thin film work.
Powered by a rechargeable battery, this unit is convenient to use anytime, anywhere. Customization also possible.
| Applications | Thin work, work used in manual tasks |
|---|---|
| Work | Si, glass, metal foil, film, porous material |
Since there is no adsorption action on the second sheet, it is possible to adsorb only the first sheet of laminated paper.
| Applications | Inside printers, paper feeder and removal rollers |
|---|---|
| Work | Paper |
A point-contact wafer transfer hand for vacuum applications.
| Application | In vacuum equipment, transfer hand |
|---|---|
| Work | Silicon wafers, glass wafers, etc. |
Using world-class technology to
innovate the manufacturing workplace
Producing next-generation displays
and semiconductor devices
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by history