The system can be made cordless by integrating an adsorption component, a power supply board, and a battery.
Work position can be fixed without the need for in-line operation or equipment modifications, or wiring processing for existing facilities.
|Application||For in-line equipment, stage jigs, use in vacuum equipment, fixed stages|
|Work||Glass, film, metal pieces, glass pieces etc.|
Handheld type (soft palm)
Handheld electrostatic chuck for wafers, glass substrates, metal foils, and thin film work.
Powered by a rechargeable battery, this unit is convenient to use anytime, anywhere. Customization also possible.
|Applications||Thin work, work used in manual tasks|
|Work||Si, glass, metal foil, film, porous material|
Since there is no adsorption action on the second sheet, it is possible to adsorb only the first sheet of laminated paper.
|Applications||Inside printers, paper feeder and removal rollers|
A point-contact wafer transfer hand for vacuum applications.
|Application||In vacuum equipment, transfer hand|
|Work||Silicon wafers, glass wafers, etc.|