An electrostatic chuck provided as a suction stage for production equipment.
This stage is used as an adsorption tool for thin and brittle porous materials, from special environments (vacuum heating environments) to model change-free applications.
We also sell sets with a dedicated DC power supply as well as provide system proposals based on your operation processes and work size.
| Applicable work |
Semiconductor wafers 
Metal foil 
Glass 
Porous materials 
Film 
Metal foils
Paper 
|
|---|---|
| Work applicable for adsorption | Smartphones, tablets, PCs, TV panels, semiconductors, electronic components, fuel cells |
| Material applicable for adsorption | Glass, film, Si, metal leaf, paper, ceramic, etc. |
| Applications for adsorption | Film forming equipment, etching equipment, vacuum bonding equipment, inspection equipment, various conveyor equipment |
| ESC stage structure patterns |
Electrostatic chuck suction part 
Dedicated DC power supply 
|
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