An electrostatic chuck provided as a suction stage for production equipment.
This stage is used as an adsorption tool for thin and brittle porous materials, from special environments (vacuum heating environments) to model change-free applications.
We also sell sets with a dedicated DC power supply as well as provide system proposals based on your operation processes and work size.
Work applicable for adsorption
Smartphones, tablets, PCs, TV panels, semiconductors, electronic components, fuel cells
Material applicable for adsorption
Glass, film, Si, metal leaf, paper, ceramic, etc.
Applications for adsorption
Film forming equipment, etching equipment, vacuum bonding equipment, inspection equipment, various conveyor equipment
ESC stage structure patterns
Electrostatic chuck suction part
Dedicated DC power supply
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Using world-class technology to innovate the manufacturing workplace