Product Outline
Point-contact wafer hand
Wafer Hand is best for transferring warped wafers.
Wafer Hand is a point-contact transfer hand that can clamp wafers with Coulomb force and realizes stable rapid transfer in vacuum environments.
The contact area of an object can be minimized because of the point-contact feature.
Introduction example
● Transfer hands for wafers, silicon wafers and compound wafers
Features
● Clamp warped wafers stably that are hard to clamp with a vacuum clamp.
● Available in air and vacuum environments
● The contact area of an object can be minimized because of the point-contact feature.
Specifications
Wafer size |
8" & 12"
|
|---|---|
Contents |
A main body of Wafer Hand and a dedicated
|
Control |
Electric control with a dedicated controller
|
Operating environments |
Air and vacuum
|
Clamping force |
4000gf (Max) variable
|
E-mail:e-eigyo@tsukubaseiko.co.jp